CyberOptics Vibration Monitoring Software Offers New Capabilities that Improve Visual Data Analysis and Third-Party Applications
CyberOptics Vibration Monitoring Software Offers New Capabilities that Improve Visual Data Analysis and Third-Party Applications
Vibration Software Filters Out Accepted Vibration Frequencies in a Process to Identify Anomalies
Wilsonville, Oregon, December 1, 2010– CyberOptics Semiconductors demonstrates the latest release of its wafer vibration monitoring during Semicon Japan in booth number 5B-512. With vibration tied to semiconductor process equipment failure, low yields and cycle times, CyberOptics’ AVS 2.0 vibration monitoring software provides engineers the data needed to predict equipment failures to improve process yield and cycle times.
The AVS 2.0 software works in unison with our Auto Vibration System (AVS), a wireless, wafer-like device that allows engineers to established yield-based vibration standards for equipment and technicians, identify vibration sources and set acceptable acceleration parameters for equipment.
Using the AVS, vibration anomalies can be identified during wafer processing by filtering out acceptable vibration frequencies produced by regular slow-moving equipment or high-frequency noises between 1 to 200 Hz. The vibration monitoring software allows engineers to set low, high and band pass filters of equipment vibration frequencies to filter out vibrations of 20Hz and below and monitor vibrations of 21Hz and above to troubleshoot for vibration-related contamination. Engineers can use the AVS’ three-axis data to protect deposition uniformity and optimize yield and equipment productivity, reducing qualification time and maintenance expenses.
At Semicon Japan, CyperOptics will demonstrate the newest capabilities of the AVS 2.0 vibration monitoring software including new upgrades such as enhanced trace plotting (actual graphical data representation) that improves the visual analysis of data and data exportation capabilities that support third-party applications.
If you missed visiting the booth, you can download a demo of the AVS 2.0 software at http://www.cyberopticssemi.com/downloads/wafersense/avs/or contact sales at (503) 495-2200 for more information. You can also visit the company’s Japanese language site at http://jp.cyberopticssemi.com.
About CyberOptics Semiconductor, Inc.
CyberOptics Semiconductor develops automated products that seamlessly measure critical parameters in semiconductor fabrication processes and equipment. The company’s pioneering WaferSense® line includes wireless metrology devices for vibration, leveling, gapping, teaching and sensing airborne particles in semiconductor process equipment. The company is the largest producer of reflective wafermapping sensors and a leading provider of frame grabber machine vision boards under its HAMA Sensors™ and Imagenation™ brands. CyberOptics Semiconductor is a subsidiary of CyberOptics Corp. (Nasdaq:CYBE), one of the world's leading providers of process yield and throughput improvement solutions for the electronic assembly and semiconductor fabrication industries. For information, visit http://www.cyberopticssemi.com/, e-mail CSsales@cyberoptics.com or call 800-366-9131.
Contacts:
CyberOptics Semiconductor, Inc.
Lindsey Dietz
503.495.2217
ldietz[at]cyberoptics.com
http://www.cyberopticssemi.com/